Integrated optic micropressure sensor using ring resonator

In this paper, sensitivity improvement of integrated optic micropressure sensors is discussed. The sensor is composed of a diaphragm and a ring resonator that is a multiple interference optical circuit. A part of the waveguide of the ring resonator is on the diaphragm. When a pressure is applied to the sensor, the diaphragm is deformed and the refractive index changes slightly so that a phase shift is induced on the guided wave propagating on the diaphragm. From the change of the resonant frequency caused by this phase change, the magnitude of the applied pressure is detected. In this study, particular emphasis is on the relationship between the diaphragm dimensions and the sensor sensitivity. From the analysis of the sensor operation, it is concluded that the use of a square-shaped diaphragm with a waveguide of the ring resonator at the edge in addition to employing the TM-like mode is most suited for a highly sensitive sensor. Further, from the evaluation of the minimum detectable pressure, it is expected that an integrated optic microprocessor sensor can be realized which is sensitive to such low pressure as underwater acoustics.