Polyamide-imide polymer thin films for integrated optics

被引：32

作者：

Bryce, RM ^{[1
]}

Nguyen, HT

Nakeeran, P

Clement, T

Haugen, CJ

Tykwinski, RR

DeCorby, RG

McMullin, JN

机构：

[1] Univ Alberta, Elect & Comp Engn Res Facil, Edmonton, AB T6G 2V4, Canada

[2] TRLabs, Edmonton, AB T6G 2V4, Canada

[3] Univ Alberta, Dept Chem, Edmonton, AB T6G 2G2, Canada

来源：

THIN SOLID FILMS | 2004年 / 458卷 / 1-2期

关键词：

optical coatings; optical properties; plasma processing and deposition; polymers;

D O I：

10.1016/j.tsf.2003.11.268

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The applicability of a polyamide-imide (PAI) polymer to thin film optical applications was investigated. The polymer preparation and spin characteristics are described in detail. The films exhibited good adhesion to silicon, glass, and benzocyclobutene polymer. The refractive index was measured in the near infrared region. To demonstrate feasibility for devices, features were plasma etched into PAI films. Oversized inverted rib waveguides were also fabricated using PAI as a core material, and losses as low as 0.2 dB/cm were measured at 830 nm. Polyamide-imide is a highly robust and stable polymer, similar to the widely used polyimides, and is an excellent candidate material for integrated optics applications. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：233 / 236

页数：4

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