Structure and physicomechanical properties of nanocrystalline boride-nitride films

被引：39

作者：

Andrievskii, RA

Kalinnikov, GV

Kobelev, NP

Soifer, YM

Shtanskii, DV

机构：

[1] RUSSIAN ACAD SCI, INST SOLID STATE PHYS, CHERNOGOLOVKA 142432, RUSSIA

[2] TSNIICHERMET, RUSSIAN SCI CTR, MOSCOW 107005, RUSSIA

来源：

PHYSICS OF THE SOLID STATE | 1997年 / 39卷 / 10期

关键词：

D O I：

10.1134/1.1129885

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

Results are presented from an electron-microscopy study and x-ray structural analysis of nanocrystalline films based on titanium boride, obtained by rf and dc magnetron sputtering. The composition and formulas of the films are determined by Auger analysis. The hardness and elastic and electrical properties of the films are investigated. The role of size effects and deviations from stoichiometry (structural vacancies) is discussed. (C) 1997 American Institute of Physics.

引用

页码：1661 / 1666

页数：6

共 33 条

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