Preparation of supported metallic nanoparticles using supercritical fluids: A review

被引:218
作者
Zhang, Ying [1 ]
Erkey, Can [1 ]
机构
[1] Univ Connecticut, Dept Chem Engn, Storrs, CT 06269 USA
关键词
supercritical fluids (SCFs); supercritical carbon dioxide (scCO(2)); nanoparticles;
D O I
10.1016/j.supflu.2006.03.021
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Supercritical fluids (SCFs) have been used to deposit thin metal films onto a wide range of surfaces and incorporate metallic particles into different inorganic and organic substrates for microelectronic, optical and catalytic applications. The technique involves the dissolution of a metallic precursor in a SCF and the exposure of a substrate to the solution. After incorporation of the precursor with the substrate, the metallic precursor is reduced to its metal form by a wide variety of methods resulting in films or particles. The reduction methods employed are chemical reduction in the SCF with a reducing agent, such as hydrogen and alcohols, thermal reduction in the SCF and thermal decomposition in an inert atmosphere or chemical conversion with hydrogen or air. Both highly dispersed and uniformly distributed metal crystallites (< 10 nm) and agglomerated metal clusters (tens of nanometers) with a wide size distribution supported on a variety of substrates such as silicon wafer, metal foil, polymer membranes, organic and inorganic porous materials were produced by the different studies in the literature. The average particle size and size distribution are affected by the precursor reduction method and conditions, type and amount of precursor in the synthesis system, the surface properties of the substrate such as surface area and chemical nature of the surface. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:252 / 267
页数:16
相关论文
共 64 条
[1]   Scale-up for a process of supercritical extraction with adsorption of solute onto active carbon.: Application to soil remediation [J].
Alonso, E ;
Cantero, FJ ;
García, J ;
Cocero, MJ .
JOURNAL OF SUPERCRITICAL FLUIDS, 2002, 24 (02) :123-135
[2]  
Bekyarova E, 2000, ADV MATER, V12, P1625, DOI 10.1002/1521-4095(200011)12:21<1625::AID-ADMA1625>3.0.CO
[3]  
2-9
[4]   Deposition of conformal copper and nickel films from supercritical carbon dioxide [J].
Blackburn, JM ;
Long, DP ;
Cabañas, A ;
Watkins, JJ .
SCIENCE, 2001, 294 (5540) :141-145
[5]  
Boggess RK, 1997, J APPL POLYM SCI, V64, P1309, DOI 10.1002/(SICI)1097-4628(19970516)64:7<1309::AID-APP10>3.0.CO
[6]  
2-S
[7]   Chemistry and properties of nanocrystals of different shapes [J].
Burda, C ;
Chen, XB ;
Narayanan, R ;
El-Sayed, MA .
CHEMICAL REVIEWS, 2005, 105 (04) :1025-1102
[8]   Deposition of gold films and nanostructures from supercritical carbon dioxide [J].
Cabañas, A ;
Long, DP ;
Watkins, JJ .
CHEMISTRY OF MATERIALS, 2004, 16 (10) :2028-2033
[9]   Alcohol-assisted deposition of copper films from supercritical carbon dioxide [J].
Cabañas, A ;
Shan, XY ;
Watkins, JJ .
CHEMISTRY OF MATERIALS, 2003, 15 (15) :2910-2916
[10]   Deposition of Cu films from supercritical fluids using Cu(I) β-diketonate precursors [J].
Cabañas, A ;
Blackburn, JM ;
Watkins, JJ .
MICROELECTRONIC ENGINEERING, 2002, 64 (1-4) :53-61