Fabrication of PDMS (polydimethylsiloxane) microlens and diffuser using replica molding

被引：128

作者：

Shih, Teng-Kai

Chen, Chia-Fu

Ho, Jeng-Rong

Chuang, Fang-Tzu

机构：

[1] Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan

[2] Natl Chung Cheng Univ, Grad Inst Optomech Engn, Chiayi 621, Taiwan

来源：

MICROELECTRONIC ENGINEERING | 2006年 / 83卷 / 11-12期

关键词：

PDMS; microlens; diffuser; replica molding;

D O I：

10.1016/j.mee.2006.05.006

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 [电气工程]; 0809 [电子科学与技术];

摘要：

This paper reports the fabrication method of PDMS (polydimethylsiloxane) microlens array based on the replica molding process, casting a liquid PDMS into concave microlens molds. Concave microlens molds were fabricated through spin-coating processes suspended a liquid PMMA film on the micro-drilled hole, leading to the formation of the special curvature. Then, PDMS microlens arrays and diffusers were fabricated by replica molding and discussed in this study. The fabricated microlenses have both good surface roughness and high-quality optical properties. Therefore, diffusers were fabricated by two-step replica molding. A high-intensity He-Ne laser beam was uniformly spread through diffusers. Experimental tests demonstrated that all PDMS elements are successfully fabricated by replica molding process and operated during optical measurement. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：2499 / 2503

页数：5

共 11 条

[1]

Reflective microoptical element array fabricated by photofabrication technique [J].