Short-pulse laser ablation of solid targets

被引:491
作者
Momma, C [1 ]
Chichkov, BN [1 ]
Nolte, S [1 ]
vonAlvensleben, F [1 ]
Tunnermann, A [1 ]
Welling, H [1 ]
Wellegehausen, B [1 ]
机构
[1] UNIV HANNOVER, INST QUANTENOPT, D-30167 HANNOVER, GERMANY
关键词
laser ablation; material processing; short-pulse lasers;
D O I
10.1016/0030-4018(96)00250-7
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Laser ablation of solid targets by Ti:sapphire laser radiation is studied. The solid targets are irradiated by 0.2-5000 ps laser pulses in the intensity range of 10(9) - 5 x 10(16) W/cm(2). Dependences of the ablation depth on the laser pulse energy and pulse duration are discussed. Advantages of sub-picosecond laser radiation for precise material processing are demonstrated.
引用
收藏
页码:134 / 142
页数:9
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