Recent advancements in the gas-phase MicroChemLab

被引:168
作者
Lewis, Patrick R. [1 ]
Manginell, Ronald P.
Adkins, Douglas R.
Kottenstette, Richard J.
Wheeler, David R.
Sokolowski, Sara S.
Trudell, Daniel E.
Byrnes, Joy E.
Okandan, Murat
Bauer, Joseph M.
Manley, Robert G.
Frye-Mason, Gregory C.
机构
[1] Sandia Natl Labs, Albuquerque, NM 87123 USA
[2] Rochester Inst Technol, Dept Microelect Engn, Rochester, NY 14623 USA
[3] Nomad Inc, Albuquerque, NM 87107 USA
关键词
acoustic detection microanalytical system; gas chromatography; gas-phase analysis; monolithic integration; pivot plate resonator; preconcentration; surface acoustic wave array (SAW);
D O I
10.1109/JSEN.2006.874495
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Sandia's hand-held MicroChemLab system uses a micromachined preconcentrator, a gas chromatography channel, and a quartz surface acoustic wave array detector for sensitive/selective detection of gas-phase chemical analytes. Requisite system size, performance, power budget, and time response mandate microfabrication of the key analytical system components. In the fielded system, hybrid integration has been employed, permitting optimization of. the individual components. Recent improvements in the hybrid-integrated system, using plastic, metal, or silicon/glass manifolds, is described, as is system performance against semivolatile compounds and toxic industrial chemicals. The design and performance of a new three-dimensional micro-preconcentrator is also introduced. To further reduce system dead volume, eliminate unheated transfer lines, and simplify assembly, there is an effort to monolithically integrate the silicon PC and GC with a suitable silicon-based detector, such as a magnetically-actuated flexural plate wave sensor or a magnetically-actuated pivot plate resonator.
引用
收藏
页码:784 / 795
页数:12
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