Formation of beta-C3N4 phase in C-N films deposited by reactive ionized cluster beam method

被引：16

作者：

Feng, JY

Zheng, Y

Xie, JQ

机构：

[1] Dept. of Mat. Sci. and Engineering, Tsinghua University

来源：

MATERIALS LETTERS | 1996年 / 27卷 / 4-5期

基金：

中国国家自然科学基金;

关键词：

beta-C3N4; phase; C-N films; deposition; reactive ionized cluster beam method;

D O I：

10.1016/0167-577X(95)00288-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Carbon nitride thin films have been prepared by the reactive ionized cluster beam (RICE) method using mixed beam of activated carbon and nitrogen atoms and atom clusters produced from polyethylene and NH3. The structure of the films has been characterized by electron diffraction analysis that shows strong evidences suggesting the formation of crystalline beta-C3N4 phase embedded in the amorphous film matrix. Rutherford backscattering measurements show that average nitrogen content is up to 40%. X-ray photoelectron spectroscopy indicates that carbon and nitrogen form a weak polarized covalent bond in these C-N thin films.

引用

收藏

页码：219 / 223

页数：5

相关论文

共 19 条

[1] FORMATION OF CARBON NITRIDE FILMS ON SI(100) SUBSTRATES BY ELECTRON-CYCLOTRON-RESONANCE PLASMA-ASSISTED VAPOR-DEPOSITION [J].

BOUSETTA, A ;

LU, M ;

BENSAOULA, A ;

SCHULTZ, A .

APPLIED PHYSICS LETTERS, 1994, 65 (06) :696-698

[2] GROWTH AND CHARACTERIZATION OF C-N THIN-FILMS [J].

CHEN, MY ;

LIN, X ;

DRAVID, VP ;

CHUNG, YW ;

WONG, MS ;

SPROUL, WD .

SURFACE & COATINGS TECHNOLOGY, 1992, 55 (1-3) :360-364

[3] FORMATION OF CARBON NITRIDE FILMS BY MEANS OF ION ASSISTED DYNAMIC MIXING (IVD) METHOD [J].

FUJIMOTO, F ;

OGATA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1993, 32 (3B) :L420-L423

[4] STRUCTURAL AND OPTICAL-PROPERTIES OF AMORPHOUS-CARBON NITRIDE [J].

HAN, HX ;

FELDMAN, BJ .

SOLID STATE COMMUNICATIONS, 1988, 65 (09) :921-923

[5] SYMMETRY-BREAKING IN NITROGEN-DOPED AMORPHOUS-CARBON - INFRARED OBSERVATION OF THE RAMAN-ACTIVE G-BANDS AND D-BANDS [J].

KAUFMAN, JH ;

METIN, S ;

SAPERSTEIN, DD .

PHYSICAL REVIEW B, 1989, 39 (18) :13053-13060

[6] ELECTRICAL AND ELECTRON-SPIN-RESONANCE MEASUREMENTS OF AMORPHOUS HYDROGENATED CARBON NITRIDE [J].

LIN, S ;

NOONAN, K ;

FELDMAN, BJ ;

DONG, M ;

JONES, MT .

SOLID STATE COMMUNICATIONS, 1991, 80 (02) :101-102

[7] STRUCTURAL-PROPERTIES AND ELECTRONIC-STRUCTURE OF LOW-COMPRESSIBILITY MATERIALS - BETA-SI3N4 AND HYPOTHETICAL BETA-C3N4 [J].

LIU, AY ;

COHEN, ML .

PHYSICAL REVIEW B, 1990, 41 (15) :10727-10734

[8] PREDICTION OF NEW LOW COMPRESSIBILITY SOLIDS [J].

LIU, AY ;

COHEN, ML .

SCIENCE, 1989, 245 (4920) :841-842

[9] PHOTOELECTRON-SPECTROSCOPY STUDY OF AMORPHOUS A-CNXH [J].

MANSOUR, A ;

UGOLINI, D .

PHYSICAL REVIEW B, 1993, 47 (16) :10201-10209

[10] SYNTHESIS OF CARBON-NITRIDE FILMS USING A FAST-SWITCHED DUAL-SOURCE LOW-ENERGY ION-BEAM DEPOSITION SYSTEM [J].

MARTON, D ;

ALBAYATI, AH ;

TODOROV, SS ;

BOYD, KJ ;

RABALAIS, JW .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 90 (1-4) :277-281