Practical properties of thermochromically induced super-resolution read-only memory disk (TSR-ROM)

被引:4
作者
Hatakeyama, M
Nomura, A
Oishi, K
Tsujita, K
Suzuki, Y
Ueno, I
机构
[1] Victor Co Japan, Technol Dev Div, Yokosuka, Kanagawa 2398550, Japan
[2] Victor Technobrain Co Ltd, Yokosuka, Kanagawa 2398550, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2002年 / 41卷 / 3B期
关键词
thermochromic; super-resolution; TSR; read-only memory disk; margin;
D O I
10.1143/JJAP.41.1905
中图分类号
O59 [应用物理学];
学科分类号
摘要
Super-resolution effects and practical properties of a thermochromic mask layer for a read-only memory disk are evaluated using a conventional disk tester with a 635 nm light source and a 0.6 numerical aperture (NA) pick-up. A carrier-to-noise ratio (C/N) of over 40 dB is obtained at a pit length of 0.20 mum which is far smaller than the resolution limit. Sufficient tilt margins and power margin are obtained at the capacity of 11 GB.
引用
收藏
页码:1905 / 1906
页数:2
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