Diamond photonic band gap synthesis by umbrella holographic lithography

被引：38

作者：

Toader, Ovidiu ^{[1
]}

Chan, Timothy Y. M. ^{[1
]}

John, Sajeev ^{[1
]}

机构：

[1] Univ Toronto, Dept Phys, Toronto, ON M5S 1A7, Canada

来源：

APPLIED PHYSICS LETTERS | 2006年 / 89卷 / 10期

关键词：

D O I：

10.1063/1.2347112

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The authors demonstrate that optical interference lithography yields diamond photonic band gap (PBG) architectures with PBGs as large as 25% when the exposed photoresist is replicated with silicon. This process utilizes five linearly polarized beams propagating from the same half-space (umbrella configuration), a setup considerably simpler than the widely studied counterpropagating four-beam setup. Using the umbrella configuration, this diamond structure is also achieved by two or more exposures using fewer interfering laser beams. (c) 2006 American Institute of Physics.

引用

页数：3

共 10 条

[1] Fabrication of photonic crystals for the visible spectrum by holographic lithography [J].

Campbell, M ;

Sharp, DN ;

Harrison, MT ;

Denning, RG ;

Turberfield, AJ .

NATURE, 2000, 404 (6773) :53-56

[2] Photonic band gap templating using optical interference lithography [J].

Chan, TYM ;

Toader, O ;

John, S .

PHYSICAL REVIEW E, 2005, 71 (04)

[3] Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography [J].

Divliansky, I ;

Mayer, TS ;

Holliday, KS ;

Crespi, VH .

APPLIED PHYSICS LETTERS, 2003, 82 (11) :1667-1669

[4] Three-dimensional photonic crystals by holographic lithography using the umbrella configuration: Symmetries and complete photonic band gaps [J].

Meisel, DC ;

Wegener, M ;

Busch, K .

PHYSICAL REVIEW B, 2004, 70 (16) :1-10

[5] Three-dimensional face-centered-cubic photonic crystal templates by laser holography: fabrication, optical characterization, and band-structure calculations [J].

Miklyaev, YV ;

Meisel, DC ;

Blanco, A ;

von Freymann, G ;

Busch, K ;

Koch, W ;

Enkrich, C ;

Deubel, M ;

Wegener, M .

APPLIED PHYSICS LETTERS, 2003, 82 (08) :1284-1286

[6] Photofabrication of three-dimensional photonic crystals by multibeam laser interference into a photopolymerizable resin [J].

Shoji, S ;

Kawata, S .

APPLIED PHYSICS LETTERS, 2000, 76 (19) :2668-2670

[7] New route to three-dimensional photonic bandgap materials:: Silicon double inversion of polymer templates [J].

Tétreault, N ;

von Freymann, G ;

Deubel, M ;

Hermatschweiler, M ;

Pérez-Willard, F ;

John, S ;

Wegener, M ;

Ozin, GA .

ADVANCED MATERIALS, 2006, 18 (04) :457-+

[8] Photonic band gap architectures for holographic lithography [J].

Toader, O ;

Chan, TYM ;

John, S .

PHYSICAL REVIEW LETTERS, 2004, 92 (04) :4

[9] Photonic crystals through holographic lithography: Simple cubic, diamond-like, and gyroid-like structures [J].

Ullal, CK ;

Maldovan, M ;

Thomas, EL ;

Chen, G ;

Han, YJ ;

Yang, S .

APPLIED PHYSICS LETTERS, 2004, 84 (26) :5434-5436

[10] Three-dimensional photonic crystals fabricated by visible light holographic lithography [J].

Wang, X ;

Xu, JF ;

Su, HM ;

Zeng, ZH ;

Chen, YL ;

Wang, HZ ;

Pang, YK ;

Tam, WY .

APPLIED PHYSICS LETTERS, 2003, 82 (14) :2212-2214

← 1 →