Deposition of YBCO and NBCO films on areas of 9 inches in diameter

High quality YBa2Cu3O7 thin films can be grown by reactive thermal co-evaporation. Combined with a rotating disk heater this method allows to fabricate even double sided homogeneous films on substrate areas up to 9 '' diameter. A scanning inductive j(C) probe is used to monitor the homogeneity of critical current densities of typically > 2 MA/cm(2). Surface resistance values are found to be below 500 mu Omega @ 10 GHz. On biaxially aligned buffer layers on polycrystalline substrates j(C) values of 1.3 MA/cm(2) are achieved as well. The properties of Nd1-xBa2+xCu3O7 films grown with the same system are presented and evaluated.