Development of tools for handling and assembling microcomponents

被引:33
作者
Ansel, Y [1 ]
Schmitz, F
Kunz, S
Gruber, HP
Popovic, G
机构
[1] Inst Microtechnol Mainz, D-55129 Mainz, Germany
[2] AGIE SA, CH-6616 Losone, Switzerland
[3] Vienna Tech Univ, Inst Mikro & Feinwektech, A-1040 Vienna, Austria
关键词
Fits and tolerances - Machine tools - Materials handling - Precision engineering;
D O I
10.1088/0960-1317/12/4/315
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The handling and assembling of microcomponents is usually considered as a bottleneck in the fabrication process of hybrid microsystems. This is especially true for very small components that require high positioning tolerances. In this paper we present gripping solutions for various applications concerning the handling and assembling of microcomponents as well as the major microgripper manufacturing technologies.
引用
收藏
页码:430 / 437
页数:8
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