Coplanar waveguides on dielectric membranes micromachined on a GaAs substrate

被引：18

作者：

Salzenstein, P

Dupuis, O

Helal, M

Lheurette, E

Vanbesien, O

Mounaix, P

Lippens, D

机构：

[1] Inst. d'Electron. M., Univ. des Sci. et Technol. de Lille, 59652 Villeneuve d'Ascq Cedex, Avenue Poincaré

来源：

ELECTRONICS LETTERS | 1996年 / 32卷 / 09期

关键词：

coplanar waveguides; transmission lines;

D O I：

10.1049/el:19960564

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

GaAs micromachining technology was used for fabricating coplanar transmission lines on Si3N4 and polyimide membranes deposited on GaAs substrates. On-wafer measurements of scattering parameters up to 75GHz for several line configurations show a constant phase velocity of 2.9 10(8) m/s and a predominance of metallic losses with a square root frequency dependence.

引用

页码：821 / 822

页数：2

共 6 条

[1]

BIANCO B, 1976, ALTA FREQ, V2, P109

[2] TERAHERTZ ATTENUATION AND DISPERSION CHARACTERISTICS OF COPLANAR TRANSMISSION-LINES [J].

FRANKEL, MY ;

GUPTA, S ;

VALDMANIS, JA ;

MOUROU, GA .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1991, 39 (06) :910-916

[3] COPLANAR TRANSMISSION-LINES ON THIN SUBSTRATES FOR HIGH-SPEED LOW-LOSS PROPAGATION [J].

FRANKEL, MY ;

VOELKER, RH ;

HILFIKER, JN .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1994, 42 (03) :396-402

[4]

GHIONE G, 1984, ELECTRON LETT, V20, P179, DOI 10.1049/el:19840120

[5]

HELAL M, 1994, IEEE MTT-S, P1041, DOI 10.1109/MWSYM.1994.335177

[6]

WELLER MT, 1995, IEEE T MICROW THEORY, V43, P534

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