Nano/picoindentation measurements on single-crystal aluminum using modified atomic force microscopy

被引:35
作者
Kulkarni, AV [1 ]
Bhushan, B [1 ]
机构
[1] OHIO STATE UNIV,DEPT MECH ENGN,COMP MICROTRIBOL & CONTAMINAT LAB,COLUMBUS,OH 43210
关键词
nanoindentation; atomic force microscopy; mechanical property measurements; indentation size effects; strain-rate effects;
D O I
10.1016/S0167-577X(96)00160-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A nanoindentation device in conjunction with a commercial AFM is used to make indentations at ultra light loads in single-crystal aluminum. The nanoindentation device has the capability to make load-displacement measurements with subnanometer indentation depth sensitivity and in-situ imaging of indentations. Indentations were made at loads ranging from 15 to 1000 mu N using a Berkovich indenter. The load-displacement data have been used to obtain indentation hardness of single-crystal aluminum. Hysteresis, creep and strain-rate sensitivity effects have also been studied.
引用
收藏
页码:221 / 227
页数:7
相关论文
共 18 条
[1]  
Berkovich ES, 1951, IND DIAMOND REV, V11, P129
[2]   NANOINDENTATION HARDNESS MEASUREMENTS USING ATOMIC-FORCE MICROSCOPY [J].
BHUSHAN, B ;
KOINKAR, VN .
APPLIED PHYSICS LETTERS, 1994, 64 (13) :1653-1655
[3]   NANOTRIBOLOGY - FRICTION, WEAR AND LUBRICATION AT THE ATOMIC-SCALE [J].
BHUSHAN, B ;
ISRAELACHVILI, JN ;
LANDMAN, U .
NATURE, 1995, 374 (6523) :607-616
[4]   Nanotribology and nanomechanics of MEMS devices [J].
Bhushan, B .
NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS, 1996, :91-98
[5]  
Bhushan B., 1995, HDB MICRONANOTRIBOLO
[6]  
BHUSHAN B, 1996, TRIBOLOTY MECHANICS
[7]  
BHUSHAN B, 1996, PHIL MAG
[8]   MICRO-HARDNESS OF METALS AT VERY LOW LOADS [J].
GANE, N ;
COX, JM .
PHILOSOPHICAL MAGAZINE, 1970, 22 (179) :881-+
[9]  
KULKARNI AV, 1996, THIN SOLID FILMS
[10]   INDENTATION LOAD RELAXATION EXPERIMENTS WITH INDENTATION DEPTH IN THE SUBMICRON RANGE [J].
LAFONTAINE, WR ;
YOST, B ;
BLACK, RD ;
LI, CY .
JOURNAL OF MATERIALS RESEARCH, 1990, 5 (10) :2100-2106