Angular resolved EPMA analysis of thin films prepared by pulsed laser ablation of CdWO4(010)

被引:10
作者
Tanaka, K
Yokota, N
Shirai, N
Zhuang, Q
Nakata, R
机构
[1] Department of Electronic Engineering, University of Electro-Communications
关键词
D O I
10.1016/0169-4332(96)00301-7
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Thin films prepared by focused 266 nm pulsed laser ablation of CdWO4(010) single crystals were analyzed with an electron probe micro analysis (EPMA) as a function of the desorbing angle theta from the normal surface, which corresponds to the position of the films. The spatial distribution of the ablated particles and the chemical composition of the films were studied by focusing the effects of O-2 gas pressure and the substrate-target distance. These results were interpreted by the comparison with the size of the ablation plume determined by the photograph. The thin films with nearly the stoichiometric composition showed a photoluminescence similar to the single crystal.
引用
收藏
页码:264 / 267
页数:4
相关论文
共 3 条
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GRESKOVICH CD, 1992, AM CERAM SOC BULL, V71, P1120
[2]  
MILLER JC, 1993, AIP C P, V288
[3]   LASER PHOTOCHEMICAL ABLATION OF CDWO4 STUDIED WITH THE TIME-OF-FLIGHT MASS-SPECTROMETRIC TECHNIQUE [J].
TANAKA, K ;
MIYAJIMA, T ;
SHIRAI, N ;
ZHUANG, Q ;
NAKATA, R .
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