Raman microscopic studies of PVD hard coatings

被引：225

作者：

Constable, CP ^{[1
]}

Yarwood, J ^{[1
]}

Münz, WD ^{[1
]}

机构：

[1] Sheffield Hallam Univ, Mat Res Inst, Sheffield S1 1WB, S Yorkshire, England

来源：

SURFACE & COATINGS TECHNOLOGY | 1999年 / 116卷

关键词：

TiN; TiAlN; f.c.c; hard coatings; Raman microscopy; phonon modes;

D O I：

10.1016/S0257-8972(99)00072-9

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A series of PVD ceramic hard coatings (TiN, 21 N, TiAlN, TiZrN and TiCN) were deposited on steel substrates using the cathodic arc/unbalanced magnetron deposition technique. These coatings were characterised using Raman microscopy to elucidate the behaviour of the optic and acoustic phonon modes of the (cubic) crystalline lattices. Defect-induced first- (and second-) order spectra have been observed in the 200-300 and 500-800 cm(-1) regions and these have been assigned and correlated with coating composition. Changes in the position, intensity and shape of the principal TO band (640-560 cm(-1)) have been interpreted. Raman microscopy has been shown to be a very useful non-destructive complementary technique to XRD for the characterisation of PVD hard coatings. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：155 / 159

页数：5

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