Novel micro-pneumatic actuator for MEMS

被引：79

作者：

Bütefisch, S ^{[1
]}

Seidemann, V ^{[1
]}

Büttgenbach, S ^{[1
]}

机构：

[1] Tech Univ Carolo Wilhelmina Braunschweig, Inst Microtechnol, D-38124 Braunschweig, Germany

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2002年 / 97-8卷

关键词：

pneumatic actuator; micro-gripper; SU8;

D O I：

10.1016/S0924-4247(01)00843-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a micro-pneumatic actuator utilizing a new actuation principle for micro-mechanical systems. As a first application, a micro-gripper driven by two bellow-type micro-pneumatic actuators, is described. The basic structures of the micro-pneumatic actuator and the micro-gripper are fabricated by silicon dry etching in a single etching step. The device consists of a Pyrex-silicon-Pyrex sandwich structure which was assembled by anodic bonding. Alternatively, an SU8 UV-depth lithography process was used to realize the pneumatically driven micro-gripper. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：638 / 645

页数：8