Parylene surface-micromachined membranes for sensor applications

被引：30

作者：

Fan, ZF ^{[1
]}

Engel, JM ^{[1
]}

Chen, J ^{[1
]}

Liu, C ^{[1
]}

机构：

[1] Univ Illinois, Micro & Nanotechnol Lab, Micro Actuators Sensors & Syst Grp, Urbana, IL 61822 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2004年 / 13卷 / 03期

基金：

美国国家科学基金会;

关键词：

parylene; polymer; strain gauges; surface micromachining;

D O I：

10.1109/JMEMS.2004.825295

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports the design, fabrication process, and testing results of Parylene surface-micromachined membranes with integrated strain gauges or thermal resistors made of thin film metals. The membrane is suspended above the substrate. This paper demonstrates the feasibility of sensor applications with a force (tactile) sensor and a fluid shear stress sensor.

引用

页码：484 / 490

页数：7

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