Recent developments in dimensional metrology for microsystem components

The PTB currently develops a special coordinate measuring machine (muCMM) for three-dimensional metrology on microsystem components. This muCMM is aimed at a measurement uncertainty of 3D-coordinates of <0.1 mum for microstructures. The instrument contains an opto-tactile sensor and a new tactile 3D-micro-sensing system. The 3D-micro probe is based on a silicon boss-membrane with piezo resistive transducers which allow measuring deflections of the probe pin and simultaneously forces in three dimensions. First 2D-probing experiments with a stiff commercial stylus, 15 mm long, with a 300 mum ruby ball have been carried out showing its resolution and repeatability.