Lateral shearing interferometer based on two Ronchi phase gratings in series

被引:77
作者
Schreiber, H
Schwider, J
机构
[1] Lehrstuhl für Optik, Erlangen, D-91058
来源
APPLIED OPTICS | 1997年 / 36卷 / 22期
关键词
lateral shearing interferometry; phase-shifting interferometry; near IR; testing of silicon microlenses;
D O I
10.1364/AO.36.005321
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Shearing interferometers are very popular and have a growing range of applications, especially in the field of optical testing. We describe a new kind of a lateral shearing interferometer. The lateral shear is produced by two Ronchi phase gratings in series. The phase can be shifted by a lateral movement of one grating relative to the other, and the amount of shear can easily be adjusted by variation of the distance of the gratings. The simplicity of the device is an important advantage, especially in the near IR. (C) 1997 Optical Society of America.
引用
收藏
页码:5321 / 5324
页数:4
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