Synthesis of silicon nanowires using AuPd nanoparticles catalyst on silicon substrate

被引:27
作者
Liu, ZQ [1 ]
Pan, ZW [1 ]
Sun, LF [1 ]
Tang, DS [1 ]
Zhou, WY [1 ]
Wang, G [1 ]
Qian, LX [1 ]
Xie, SS [1 ]
机构
[1] Chinese Acad Sci, Inst Phys, Ctr Condensed Matter Phys, Beijing 100080, Peoples R China
关键词
nanowires; nanoparticles; catalyst;
D O I
10.1016/S0022-3697(99)00380-7
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Amorphous silicon nanowires have been prepared on Si substrates by AuPd nanoparticles/silane reaction. TEM and SEM have been employed to characterize the nanowires. The growth mechanism of the nanowires appears to be a vapor-liquid-solid mechanism. The reasons of forming amorphous silicon nanowires were discussed. (C) 2000 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:1171 / 1174
页数:4
相关论文
共 11 条
[1]   QUANTITATIVE STUDY ON GROWTH OF SILICON WHISKERS FROM SILANE AND GERMANIUM WHISKERS FROM GERMANE [J].
BOOTSMA, GA ;
GASSEN, HJ .
JOURNAL OF CRYSTAL GROWTH, 1971, 10 (03) :223-&
[2]   Observation of Si cluster formation in SiO2 films through annealing process using x-ray photoelectron spectroscopy and infrared techniques [J].
Furukawa, K ;
Liu, YC ;
Nakashima, H ;
Gao, DW ;
Uchino, K ;
Muraoka, K ;
Tsuzuki, H .
APPLIED PHYSICS LETTERS, 1998, 72 (06) :725-727
[3]   HELICAL MICROTUBULES OF GRAPHITIC CARBON [J].
IIJIMA, S .
NATURE, 1991, 354 (6348) :56-58
[4]   Large-scale synthesis of aligned carbon nanotubes [J].
Li, WZ ;
Xie, SS ;
Qian, LX ;
Chang, BH ;
Zou, BS ;
Zhou, WY ;
Zhao, RA ;
Wang, G .
SCIENCE, 1996, 274 (5293) :1701-1703
[5]  
LIU H, 1995, J VAC SCI TECHNOL B, V13, P2166
[6]   SELF-LIMITING OXIDATION FOR FABRICATING SUB-5 NM SILICON NANOWIRES [J].
LIU, HI ;
BIEGELSEN, DK ;
PONCE, FA ;
JOHNSON, NM ;
PEASE, RFW .
APPLIED PHYSICS LETTERS, 1994, 64 (11) :1383-1385
[7]   A laser ablation method for the synthesis of crystalline semiconductor nanowires [J].
Morales, AM ;
Lieber, CM .
SCIENCE, 1998, 279 (5348) :208-211
[8]   Silicon nanowhiskers grown on a hydrogen-terminated silicon {111} surface [J].
Ozaki, N ;
Ohno, Y ;
Takeda, S .
APPLIED PHYSICS LETTERS, 1998, 73 (25) :3700-3702
[9]   VAPOR-LIQUID-SOLID MECHANISM OF SINGLE CRYSTAL GROWTH ( NEW METHOD GROWTH CATALYSIS FROM IMPURITY WHISKER EPITAXIAL + LARGE CRYSTALS SI E ) [J].
WAGNER, RS ;
ELLIS, WC .
APPLIED PHYSICS LETTERS, 1964, 4 (05) :89-&
[10]   Growth of silicon nanowires via gold/silane vapor-liquid-solid reaction [J].
Westwater, J ;
Gosain, DP ;
Tomiya, S ;
Usui, S ;
Ruda, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (03) :554-557