Improved organic thin film transistor performance using chemically-modified gate dielectrics

被引:38
作者
Gundlach, DJ [1 ]
Kuo, CCS [1 ]
Sheraw, CD [1 ]
Nichols, JA [1 ]
Jackson, TN [1 ]
机构
[1] Penn State Univ, Dept Elect Engn, Ctr Thin Film Devices, University Pk, PA 16802 USA
来源
ORGANIC FIELD EFFECT TRANSISTORS | 2001年 / 4466卷
关键词
pentacene; naphthacene; alpha-sexithienyl; OTS; octadecyltrichlorosilane; self-assembled monolayer; organic thin film transistor; OTFTs; flexible electronics;
D O I
10.1117/12.451466
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report on the use of silicon dioxide gate dielectric chemically-modified with vapor-deposited octadecyltrichlorosilane (OTS) monolayers for improved organic thin film transistor (OTFT) performance. To date, silicon dioxide gate dielectric chemically modified with OTS monolayers deposited from solvent solution have demonstrated the highest reported OTFT performance using the small-molecule organic semiconductor pentacene as the active layer. Vapor treatment is an attractive alternative, especially for polymeric substrates that may be degraded by solvent exposure. Using our OTS vapor treatment we have fabricated photolithographically defined pentacene OTFTs on flexible polymeric substrates with field-effect mobility greater than 1.5 cm(2)/V-s. We find the performance of pentacene as well as several other small-molecule organic active layer materials can be significantly improved using silicon dioxide gate dielectric chemically-modified with vacuum vapor prime OTS. Pentacene, naphthacene, Cu-phthalocyanine, and alpha-sexithienyl OTFTs fabricated on thermally photolithographically defined "bottom" contacts typically show a factor of 2 to 5 oxidized silicon substrates with, improvement in field-effect mobility and reduced subthreshold slope when using silicon dioxide gate dielectric vacuum vapor treated with OTS compared to OTFTs on untreated gate dielectric.
引用
收藏
页码:54 / 64
页数:11
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