Preparation of copper sulfide thin Layers by a single-source MOCVD process

被引：56

作者：

Nomura, R ^{[1
]}

Miyawaki, K ^{[1
]}

Toyosaki, T ^{[1
]}

Matsuda, H ^{[1
]}

机构：

[1] OSAKA UNIV,FAC ENGN,DEPT APPL CHEM,SUITA,OSAKA 565,JAPAN

来源：

CHEMICAL VAPOR DEPOSITION | 1996年 / 2卷 / 05期

关键词：

D O I：

10.1002/cvde.19960020504

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Communication: Metal dithiocarbamate complexes are also potential candidates for the CVD of metal sulfides (see previous article). This paper reports on an investigation by mass fragmentation initiated by electron impact of the vapor phase decomposition of a copper complex in order to clarify the decomposition route and to assess its suitability as a single-source precursor for the MOCVD growth of cuprous sulfide. Reproducible growth of crystalline layers was found and the results suggested a two-step growth mode.

引用

页码：174 / &

页数：7

共 34 条

[1] INVESTIGATION OF ELECTRIC PROPERTIES OF CU2S SINGLE CRYSTALS [J].

ABDULLAEV, GB ;

ALIYAROVA, ZA ;

ZAMANOVA, EH ;

ASADOV, GA .

PHYSICA STATUS SOLIDI, 1968, 26 (01) :65-+

[2]

ARMANTROUT GA, 1976, J VAC SCI TECHNOL, V16, P212

[3] THE SOLAR ELECTRIC FUTURE [J].

BARNETT, AM .

SOLAR CELLS, 1984, 12 (1-2) :3-10

[4]

BORE KW, 1977, PHYS STATUS SOLIDI A, V40, P355

[5]

CHOPRA KL, 1983, THIN FILM SOLAR CELL, P7

[6]

Coucouvanis D., 1979, PROG INORG CHEM, V26, P302

[7] SINGLE-SOURCE III/V PRECURSORS - A NEW APPROACH TO GALLIUM-ARSENIDE AND RELATED SEMICONDUCTORS [J].

COWLEY, AH ;

JONES, RA .

ANGEWANDTE CHEMIE-INTERNATIONAL EDITION IN ENGLISH, 1989, 28 (09) :1208-1215

[8] A NEW APPROACH TO THE FABRICATION OF CUPROUS SULFIDE-CADMIUM SULFIDE SOLAR-CELLS [J].

CUMBERBATCH, TJ ;

BARDEN, PE ;

DURRANT, J .

THIN SOLID FILMS, 1988, 167 (1-2) :169-174

[9] ELECTRODEPOSITION AND MATERIAL CHARACTERIZATION OF CUXS FILMS [J].

ENGELKEN, RD ;

MCCLOUD, HE .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1985, 132 (03) :567-573

[10] OPTIMAL-DESIGN OF CDS-BASED AND CD0.8ZN0.2S-BASED SINGLE-JUNCTION AND MULTIJUNCTION SOLAR-CELLS [J].

FAN, JCC ;

PALM, BJ .

SOLAR CELLS, 1984, 12 (04) :401-420

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