Thermodynamic theory of stress distribution in epitaxial Pb(Zr, Ti)O3 thin films

被引:65
作者
Kim, HJ [1 ]
Oh, SH
Jang, HM
机构
[1] Pohang Univ Sci & Technol, Dept Mat Sci & Engn, Pohang 790784, South Korea
[2] Pohang Univ Sci & Technol, Natl Res Lab, Pohang 790784, South Korea
关键词
D O I
10.1063/1.125275
中图分类号
O59 [应用物理学];
学科分类号
摘要
A phenomenological thermodynamic model has been developed to account for the effects of the film thickness on various properties of ferroelectric thin films. To this end, we have suitably incorporated a position-dependent stress distribution function into the elastic Gibbs function. Various physical properties can be predicted as a function of the film thickness using this modified thermodynamic formalism. A comparison of the theoretical predictions with experimental values of the average strain and the para-ferro transition temperature indicates that the tensile stress caused by the cubic-tetragonal displacive phase transition dominates over the compressive thermal stress in the epitaxially oriented tetragonal Pb(Zr, Ti)O-3 thin films. (C) 1999 American Institute of Physics. [S0003-6951(99)05546-1].
引用
收藏
页码:3195 / 3197
页数:3
相关论文
共 8 条
[1]   EFFECT OF ELASTIC BOUNDARY-CONDITIONS ON MORPHOTROPIC PB(ZR,TI)O3 PIEZOELECTRICS [J].
AMIN, A ;
NEWNHAM, RE ;
CROSS, LE .
PHYSICAL REVIEW B, 1986, 34 (03) :1595-1598
[2]   FILM THICKNESS DEPENDENCE OF DIELECTRIC PROPERTY AND CRYSTAL-STRUCTURE OF PBTIO3 FILM PREPARED ON PT SIO2 SI SUBSTRATE BY METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION [J].
FUNAKUBO, H ;
HIOKI, T ;
OTSU, M ;
SHINOZAKI, K ;
MIZUTANI, N .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (9B) :4175-4178
[3]   ELECTROSTRICTIVE PROPERTIES OF THE LEAD ZIRCONATE TITANATE SOLID-SOLUTION SYSTEM [J].
HAUN, MJ ;
ZHUANG, ZQ ;
FURMAN, E ;
JANG, SJ ;
CROSS, LE .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1989, 72 (07) :1140-1144
[4]   THERMODYNAMIC THEORY OF THE LEAD ZIRCONATE-TITANATE SOLID-SOLUTION SYSTEM, .1. PHENOMENOLOGY [J].
HAUN, MJ ;
FURMAN, E ;
JANG, SJ ;
CROSS, LE .
FERROELECTRICS, 1989, 99 :13-25
[5]   Enhanced thermodynamic stability of tetragonal-phase field in epitaxial Pb(Zr,Ti)O3 thin films under a two-dimensional compressive stress [J].
Oh, SH ;
Jang, HM .
APPLIED PHYSICS LETTERS, 1998, 72 (12) :1457-1459
[6]   THICKNESS DEPENDENCE OF FERROELECTRIC DOMAINS IN THIN CRYSTALLINE FILMS [J].
TSAI, F ;
COWLEY, JM .
APPLIED PHYSICS LETTERS, 1994, 65 (15) :1906-1908
[7]   SURFACE AND SIZE EFFECTS ON FERROELECTRIC-FILMS WITH DOMAIN-STRUCTURES [J].
WANG, YG ;
ZHONG, WL ;
ZHANG, PL .
PHYSICAL REVIEW B, 1995, 51 (08) :5311-5314
[8]   EPITAXIAL-GROWTH AND DIELECTRIC-PROPERTIES OF BATIO3 FILMS ON PT ELECTRODES BY REACTIVE EVAPORATION [J].
YANO, Y ;
IIJIMA, K ;
DAITOH, Y ;
TERASHIMA, T ;
BANDO, Y ;
WATANABE, Y ;
KASATANI, H ;
TERAUCHI, H .
JOURNAL OF APPLIED PHYSICS, 1994, 76 (12) :7833-7838