Modeling and optimal design of piezoelectric cantilever microactuators

被引：265

作者：

DeVoe, DL

Pisano, AP

机构：

[1] UNIV CALIF BERKELEY,BERKELEY SENSOR & ACTUATOR CTR,BERKELEY,CA 94720

[2] UNIV CALIF BERKELEY,DEPT MECH ENGN,BERKELEY,CA 94720

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 1997年 / 6卷 / 03期

关键词：

actuator; bimorph; cantilever; model; piezoelectric; ZnO;

D O I：

10.1109/84.623116

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel model is described for predicting the static behavior of a piezoelectric cantilever actuator with an arbitrary configuration of elastic and piezoelectric layers, The model is compared to deflection measurements obtained from 500-mu m-long ZnO cantilever actuators fabricated by surface micromachining, Modeled and experimental results demonstrate the utility of the model for optimizing device design, A discussion of design considerations and optimization of device performance is presented.

引用

页码：266 / 270

页数：5

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