Fast chemical sensing with metal-insulator silicon carbide structures

被引:71
作者
Tobias, P
Baranzahi, A
Spetz, AL
Kordina, O
Janzen, E
Lundstrom, I
机构
[1] Dept. of Phys. and Msrmt. Technology, Linköping University, Linköping
关键词
D O I
10.1109/55.585361
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
It is demonstrated that the current-voltage characteristics of platinum-thin insulator silicon carbide diodes react rapidly to changes of the concentration of oxygen and hydrocarbons in the ambient already at temperatures around 500 degrees C-600 degrees C, In this letter, we use moving gas outlets to, for the first time, estimate time constants of the response in the order of a few milliseconds. The short time constants of these sensors make them suitable for applications in combustion monitoring. The new method to modulate gas concentrations rapidly at surfaces has the potential to be a valuable tool for evaluation of device structures for fast chemical sensing.
引用
收藏
页码:287 / 289
页数:3
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