MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS
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1997年
关键词:
D O I:
10.1109/MEMSYS.1997.581822
中图分类号:
TP [自动化技术、计算机技术];
学科分类号:
0812 ;
摘要:
A micro-gripper actuated by laser power has been developed The laser-powered micro-gripper is designed for handing micro-objects in very narrow space or overly crowded places, consists of a laser-powered linear actuator and a photoformed micro-gripper. This linear actuator's maximum output power was 2.3mN and the stroke length was 900 mu m,and the total dimension of the linear actuator is about 25mm in length and 2 mm in diameter.