SnO2 based gas sensitive sensor

被引：22

作者：

Bakin, AS

Bestaev, MV

Dimitrov, DT

Moshnikov, VA

Tairov, YM

机构：

[1] Electrotechnical University, St. Petersburg 197376

来源：

THIN SOLID FILMS | 1997年 / 296卷 / 1-2期

关键词：

gas sensors; thermal vacuum deposition; tin dioxide; annealing;

D O I：

10.1016/S0040-6090(96)09345-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

SnO2 films have been formed by the thermal vacuum deposition of Sn, pure Sn doped by Te and J(2) has been formed and also Sn doped by Cu with post-treatment under controlled oxygen atmosphere has been formed. Iodium had been introduced into the initial mixture as a SnJ(2) to form a better modified film surface for sensivity increase. The results of influence of annealing in dynamic vacuum conditions on SnO2 Alms properties are shown. (C) 1997 Elsevier Science S.A.

引用

页码：168 / 171

页数：4

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