Effect of the impingement on the kinetics of island aggregation in the post-nucleation stage of film growth at solid surfaces

被引：11

作者：

Fanfoni, M

Polini, R

Sessa, V

Tomellini, M

Volpe, M

机构：

[1] Univ Roma Tor Vergata, Dipartimento Sci & Tecnol Chim, I-00133 Rome, Italy

[2] Univ Roma Tor Vergata, Dipartimento Fis, I-00133 Rome, Italy

[3] Ist Nazl Fis Mat, I-00133 Rome, Italy

来源：

APPLIED SURFACE SCIENCE | 1999年 / 152卷 / 1-2期

关键词：

cluster impingement; models of surface kinetics; island growth; chemical vapor deposition; diamond;

D O I：

10.1016/S0169-4332(99)00309-8

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The kinetics of island aggregation in the post-nucleation stage, for a model case system where the impingement mechanism among the islands dominates the film growth, has been measured using scanning electron microscopy (SEM). A theoretical model previously developed is found to be in accordance with the experimental kinetics [M. Fanfoni, M. Tomellini, Appl. Surf. Sci,, 136 (1998) 338.]. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：126 / 130

页数：5

共 12 条

[1] The Johnson-Mehl-Avrami-Kolmogorov model: A brief review [J].

Fanfoni, M ;

Tomellini, M .

NUOVO CIMENTO DELLA SOCIETA ITALIANA DI FISICA D-CONDENSED MATTER ATOMIC MOLECULAR AND CHEMICAL PHYSICS FLUIDS PLASMAS BIOPHYSICS, 1998, 20 (7-8) :1171-1182

[2] Kinetics of cluster impingement in thin film nucleation at solid surfaces:: estimation of the collision series up to the four order term [J].