Influence of CVD diamond film textures on the electrical response of radiation detectors

被引：9

作者：

Jany, C ^{[1
]}

Foulon, F ^{[1
]}

Bergonzo, P ^{[1
]}

Brambilla, A ^{[1
]}

Gicquel, A ^{[1
]}

Pochet, T ^{[1
]}

机构：

[1] UNIV PARIS 13,CNRS,LAB INGN MAT & HAUTES PRESS,F-93430 VILLETANEUSE,FRANCE

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1996年 / 380卷 / 1-2期

关键词：

D O I：

10.1016/S0168-9002(96)00341-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The influence of the texture of polycrystalline CVD diamond films on their electrical properties was studied. The films were deposited by a microwave-plasma-enhanced chemical vapour deposition technique (MPCVD). <110> and <100> textured films, and non-textured films were produced under different growth conditions. Extensive measurements were carried out in order to probe the electrical properties of the films: resistivity, carrier lifetimes, mobility and carrier drift length before trapping. The influence of nitrogen impurities on the film electrical properties is addressed. CVD diamond detectors were characterised electrically in photo-current mode at room temperature under X-ray radiation at 40 keV. The results give evidence of a strong influence of the texture, nitrogen impurities and polycrystalline structural defects of the films on their use as X-ray detectors.

引用

页码：107 / 111

页数：5

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