Characterizing the process of cast molding microfluidic systems

被引:14
作者
Chiang, YM [1 ]
Bachman, M [1 ]
Chu, C [1 ]
Li, GP [1 ]
机构
[1] Univ Calif Irvine, Dept Elect & Comp Engn, Irvine, CA 92697 USA
来源
MICROFLUIDIC DEVICES AND SYSTEMS II | 1999年 / 3877卷
关键词
microchannels; microfluidics; micromolding; microfabrication; cast molding; characterizations;
D O I
10.1117/12.359350
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
Cast molding is a simple, low cost microfabrication method which offers the potential to fabricate microstructures in a large variety of polymer materials. We discuss some characterizations of a cast molding technique which exploits the use of polydimethylsiloxane as a mold material. The suitability of this process for microfluidic systems with five different polymers was studied by observing the mold sticking properties, pattern transfer resolution, and effects on surface roughness and surface wettability. The process yielded excellent results for all polymers, suggesting the suitability of cast molding as a general purpose microfabrication technique for polymers. Surface wettability was modified for some polymers.
引用
收藏
页码:303 / 311
页数:9
相关论文
共 11 条
[1]  
BERNARD A, 1998, LANGMUIR 0428, V14
[2]  
Chou S.Y., 1996, SCIENCE, V272
[3]  
FOLCH A, 1999, ASME, V121
[4]  
HANDIQUE K, 1998, TRANSDUCER RES
[5]  
HANDIQUE K, 1997, P SPIE INT SOC OPTIC, V3224
[6]  
HECKELE M, 1998, MICROSYSTEM TECHNOLO, V4
[7]  
LAPCZYNA M, 1998, APPL PHYS A-SOLID, pA66
[8]  
LORENZ H, 1997, J MICROMECHANICS MIC, V7
[9]  
NAKAMOTO T, 1996, J MICROMECHANICS MIC, V6
[10]  
PIOTTER V, 1997, MICROSYSTEM TECHNOLO, V3