Thermal balance of carbon nanoparticles in sputtering discharges

被引:18
作者
Arnas, C. [1 ]
Mouberi, A. A. [1 ]
机构
[1] Univ Provence, CNRS, Lab Phys Interact Ion & Mol, UMR 6633, F-13397 Marseille 20, France
关键词
carbon; discharges (electric); dusty plasmas; heat conduction; nanoparticles; plasma heating; plasma materials processing; sputtering; DUST PARTICLES; OPTICAL-PROPERTIES; PLASMA; GROWTH; MICROTEXTURE; MORPHOLOGY; TOKAMAKS; GRAINS;
D O I
10.1063/1.3081640
中图分类号
O59 [应用物理学];
学科分类号
摘要
The heating and cooling mechanisms of carbon nanoparticles produced by homogeneous nucleation from sputtering discharges are examined. The experiments show that particulates of several nanometers are graphitelike and therefore, are heated in the plasma. Conversely, particulates of several tens of nanometers have an amorphous carbon structure, characteristic of cold material. A classical model of thermal balance shows that nanoparticles are heated by energy transfer from the plasma particles and that big particles are efficiently cooled by thermal conduction with the discharge gas of low temperature. For a given size, the calculated dust temperature is in good agreement with the dust temperature range deduced from carbon structural analyses.
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页数:5
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