Performance of interferometric rotation encoders using diffraction gratings

被引:12
作者
Voirin, G
Benner, U
Clube, F
Darbellay, Y
Parriaux, O
Schneider, S
Sixt, P
机构
来源
MICRO-OPTICAL TECHNOLOGIES FOR MEASUREMENT, SENSORS, AND MICROSYSTEMS II AND OPTICAL FIBER SENSOR TECHNOLOGIES AND APPLICATIONS | 1997年 / 3099卷
关键词
rotation encoders; grating interferometer; high resolution displacement sensors; binary phase grating; metrology; interferometry;
D O I
10.1117/12.281223
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
High resolution optical encoders take advantage of diffraction and interference properties of light. In such components, the scale is a phase grating that diffracts light into several orders; an optical reading system makes two of them to interfere. In state of the art systems, the orders interfere after they have been spatially separated from other orders; this leads to cumbersome reading heads. A compact, fully diffractive optical reading system was designed and realised. This reading system was used for the realisation of rotation encoders. Using the competences of the Eureka EU 922 FOTA project partners, the encoder phase gratings were successfully realised and the reading system was implemented in standard rotation encoder housings, Without interpolation the encoder gives 480'000 pulses per revolution with a repeatability of 2.5 pulses.
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收藏
页码:166 / 175
页数:10
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