Design of thin film based micro grippers

被引：1

作者：

Huang, WM ^{[1
]}

Gao, XY ^{[1
]}

Tan, JP ^{[1
]}

机构：

[1] Nanyang Technol Univ, Sch Mech & Prod Engn, Singapore 639798, Singapore

来源：

MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY AND DEVICES | 2001年 / 4601卷

关键词：

MEMS; thin film; micro gripper; NiTi; shape memory alloy; piezoelectric; bimetal; deflection;

D O I：

10.1117/12.444741

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In this paper, we present the results of theoretical study of thin film technique based micro grippers. Three most popular actuation mechanisms, namely, piezoelectric, bimetal and shape memory alloy are investigated. First, we present the simulation results against the measured behavior of NiTi shape memory alloy thin film based micro grippers. Then we compare the performances of these three kinds of micro grippers. It shows that shape memory alloy based micro gripper is much better than the others.

引用

页码：123 / 130

页数：8

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