Atomic force microscopic studies of porous TiO2 thin films prepared by the sol-gel method

Porous titanium dioxide thin films were prepared from alkoxide solutions with and without polyethylene glycol (PEG) by the sol-gel method on soda-lime glass. The effects of PEG addition to the precursor solution on the microstructure and roughness of the resultant thin films were investigated by atomic force microscopy (AFM). It was found that TiO2 films prepared from the precursor solution without PEG had granular microstructure and flat texture, and was composed of about 100 nm spherical particles. With an increase in the times of coating cycles, the roughness of films decreased and the size of TiO2 particles increased. On the other hand, the larger the amount and molecular weight of the added PEG in precursor solutions, the larger the diameter and the depth of pores in the resultant films on the decomposition of PEG during heat-treatment. The surface of the films was also rougher, and fewer pores were produced during heat-treatment. The mechanism of porous structure formation in the TiO2 films was explained using the principle of spinodal phase separation.