Investigation of nano-electromechanical-systems using surface acoustic waves

被引：13

作者：

Beil, FW

Wixforth, A

Blick, RH

机构：

[1] Univ Munich, Ctr Nanosci, D-80539 Munich, Germany

[2] Univ Munich, Sekt Phys, D-80539 Munich, Germany

来源：

PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES | 2002年 / 13卷 / 2-4期

关键词：

nano-electromechanical-systems (NEMS); surface acoustic wave (SAW); sensors;

D O I：

10.1016/S1386-9477(02)00173-X

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This study presents measurements on nanomechanical resonators implemented on a GaAs substrate, We observed several eigenmodes with eigenfrequencies up to 115 MHz and quality factors of about 200. Using finite element methods we were able to match the resonances to the surface acoustic waves excitation within a few MHz. We report on investigations regarding the coupling of surface acoustic waves to the nanoresonators. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：473 / 476

页数：4

共 9 条

[1] Measurement of mechanical resonance and losses in nanometer scale silicon wires [J].