At-wavelength figure metrology of hard x-ray focusing mirrors

被引：55

作者：

Yumoto, Hirokatsu ^{[1
]}

Mimura, Hidekazu ^{[1
]}

Matsuyama, Satoshi ^{[1
]}

Handa, Soichiro ^{[1
]}

Sano, Yasuhisa ^{[1
]}

Yabashi, Makina ^{[1
]}

Nishino, Yoshinori ^{[1
]}

Tamasaku, Kenji ^{[1
]}

Ishikawa, Tetsuya ^{[1
]}

Yamauchi, Kazuto ^{[1
]}

机构：

[1] Osaka Univ, Grad Sch Engn, Dept Prec Sci & Technol, Suita, Osaka 5650871, Japan

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2006年 / 77卷 / 06期

关键词：

D O I：

10.1063/1.2216870

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We have developed an at-wavelength wave-front metrology of a grazing-incidence focusing optical systems in the hard x-ray region. The metrology is based on numerical retrieval from the intensity profile around the focal point. We demonstrated the at-wavelength metrology and estimated the surface figure error on a test mirror. An experiment for measuring the focusing intensity profile was performed at the 1-km-long beamline (BL29XUL) of SPring-8. The obtained results were compared with the profile measured using an optical interferometer and were confirmed to be in good agreement with it. This technique is a potential method of characterizing wave-front aberrations on elliptical mirrors for sub-10-nm focusing. (c) 2006 American Institute of Physics.

引用

页数：6

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