Highly oriented alpha-alumina films grown by pulsed laser deposition

被引:26
作者
Hirschauer, B [1 ]
Soderholm, S [1 ]
Chiaia, G [1 ]
Karlsson, UO [1 ]
机构
[1] ABB CORP RES, DEPT D, S-72178 VASTERAS, SWEDEN
关键词
alpha-Al2O3; film; laser ablation; pulsed laser deposition; temperature dependence; XPS; X-ray diffraction;
D O I
10.1016/S0040-6090(97)00151-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Highly oriented thin films of alpha-alumina have been grown by pulsed laser deposition on Si(lll). The influence of the substrate temperature on the film growth was studied by X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (MID). Ablation at temperatures between room temperature and 850 degrees C gave rise to incorporated crystalline aluminium (Al), while the stoichiometric and highly oriented alpha-Al2O3 films were obtained only at 850 degrees C. The XRD rocking curve measurements of the ablated films showed the full-width-at-half-maximum (FWHM) Of 0.2 degrees. Further annealing at 1000 degrees C in air for 26 h slightly improved out-of-plane orientation. (C) 1997 Elsevier Science S.A.
引用
收藏
页码:243 / 247
页数:5
相关论文
共 20 条
[1]  
CHASTAIN J, 1992, HDB XPS SPECTROSCOPY
[2]   AN EXPERIMENTAL-STUDY OF INSTABILITY IN INORGANIC GATE ISFETS [J].
CUI, CL ;
CHEUNG, PW ;
YEE, S ;
MULLER, R .
SENSORS AND ACTUATORS B-CHEMICAL, 1990, 1 (1-6) :421-424
[3]   Large area synthesis of thin alumina films by laser ablation [J].
Hirschauer, B ;
Soderholm, S ;
Paul, J ;
Flodstrom, AS .
APPLIED SURFACE SCIENCE, 1996, 99 (04) :285-291
[4]   EPITAXIAL-GROWTH OF CEO2 LAYERS ON SILICON [J].
INOUE, T ;
YAMAMOTO, Y ;
KOYAMA, S ;
SUZUKI, S ;
UEDA, Y .
APPLIED PHYSICS LETTERS, 1990, 56 (14) :1332-1333
[5]  
*JCPDS, 4787 JCPDS
[6]  
*JCPDS, 421468 JCPDS
[7]   HETEROEPITAXIAL GROWTH OF SRO FILMS ON SI SUBSTRATES [J].
KADO, Y ;
ARITA, Y .
JOURNAL OF APPLIED PHYSICS, 1987, 61 (06) :2398-2400
[8]   SURFACE CHARACTERIZATION OF MODEL URUSHIBARA CATALYSTS [J].
KLEIN, JC ;
HERCULES, DM .
JOURNAL OF CATALYSIS, 1983, 82 (02) :424-441
[9]  
MATOLIN V, 1996, IN PRESS THIN SOLID
[10]   STUDY OF CORE ELECTRON BINDING-ENERGIES IN SOME GROUP IIIA, VB, AND VIB COMPOUNDS [J].
MCGUIRE, GE ;
SCHWEITZ.GK ;
CARLSON, TA .
INORGANIC CHEMISTRY, 1973, 12 (10) :2450-2453