TiO2 nanotubes manufactured by anodization of Ti thin films for on-chip Li-ion 2D microbatteries

被引：144

作者：

Ortiz, Gregorio F. ^{[1
,2
,3
,4
]}

Hanzu, Ilie ^{[1
,2
,3
]}

Knauth, Philippe ^{[1
,2
,3
]}

Lavela, Pedro ^{[4
]}

Tirado, Jose L. ^{[4
]}

Djenizian, Thierry ^{[1
,2
,3
]}

机构：

[1] Univ Aix Marseille 1, CNRS, Lab Chim Prov,Ctr St Jerome, UMR 6264,Electrochem Mat Res Grp, F-13397 Marseille 20, France

[2] Univ Aix Marseille 2, CNRS, Lab Chim Prov,Ctr St Jerome, UMR 6264,Electrochem Mat Res Grp, F-13397 Marseille 20, France

[3] Univ Aix Marseille 3, CNRS, Lab Chim Prov,Ctr St Jerome, UMR 6264,Electrochem Mat Res Grp, F-13397 Marseille 20, France

[4] Univ Cordoba, Lab Quim Inorgan, E-14071 Cordoba, Spain

来源：

ELECTROCHIMICA ACTA | 2009年 / 54卷 / 17期

关键词：

Anodization; Self-organization; Titania nanotubes; Li-ion microbatteries; Anode materials; ELECTRODE MATERIALS; ANODE MATERIALS; LITHIUM; PERFORMANCE; TITANIUM; BATTERY; MORPHOLOGY; ADDITIVES; CATHODES; FLUORIDE;

D O I：

10.1016/j.electacta.2009.02.085

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

The use of self-organized TiO2 nanotube arrays electrochemically grown onto Si is investigated for the fabrication of an alternative electrode dedicated to on-chip Li-ion 2D microbatteries. Discharge/charge curves and cycling performance are studied in lithium-anode electrochemical test cells for both amorphous and crystalline titania nanotubes. At 5 mu A cm(-2) amorphous TiO2 nanotube layers onto Si deliver a maximum areal capacity of 89 mu Ah cm(-2) in the first reversible discharge and 56 mu Ah cm(-2) over 50 cycles. We demonstrate that these nanostructured thin film electrodes showing such electrochemical performances are compatible with IC technology. (C) 2009 Elsevier Ltd. All rights reserved.

引用

页码：4262 / 4268

页数：7

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