Thermal detection mechanism of SiC based hydrogen resistive gas sensors

被引：16

作者：

Fawcett, Timothy J. ^{[1
]}

Wolan, John T.

Spetz, Anita Lloyd

Reyes, Meralys

Saddow, Stephen E.

机构：

[1] Univ S Florida, Dept Chem Engn, Tampa, FL 33620 USA

[2] Linkoping Univ, SSENCE, SE-58183 Linkoping, Sweden

[3] Linkoping Univ, Div Appl Phys, SE-58183 Linkoping, Sweden

[4] Univ S Florida, Dept Elect Engn, Tampa, FL 33620 USA

来源：

APPLIED PHYSICS LETTERS | 2006年 / 89卷 / 18期

关键词：

D O I：

10.1063/1.2360905

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Silicon carbide (SiC) resistive hydrogen gas sensors have been fabricated and tested. Planar NiCr contacts were deposited on a thin 3C-SiC epitaxial film grown on thin Si wafers bonded to polycrystalline SiC substrates. At 673 K, up to a 51.75 +/- 0.04% change in sensor output current and a change in the device temperature of up to 163.1 +/- 0.4 K were demonstrated in response to 100% H-2 in N-2. Changes in device temperature are shown to be driven by the transfer of heat from the device to the gas, giving rise to a thermal detection mechanism. (c) 2006 American Institute of Physics.

引用

页数：3

共 21 条

[1]

ASHCROFT NW, 1976, SOLID STATE PHYS, P562

[2]

BIRD RB, 2002, TRANSPORT PHENOMENA, P434

[3] Wide-range (0.33%-100%) 3C-SiC resistive hydrogen gas sensor development [J].

Fawcett, TJ ;

Wolan, JT ;

Myers, RL ;

Walker, J ;

Saddow, SE .

APPLIED PHYSICS LETTERS, 2004, 85 (03) :416-418

[4]

Goldberg Y, 2001, PROPERTIES OF ADVANCED SEMICONDUCTOR MATERIALS: GAN, AIN, INN, BN, SIC, SIGE, P93

[5]

HUNTER GW, 1997, 107444 NASA

[6] Utilizing disk thermistors to indirectly measure convective heat transfer coefficients for forced, natural and combined (mixed) convection [J].

Kobus, CJ .

EXPERIMENTAL THERMAL AND FLUID SCIENCE, 2005, 29 (06) :659-669

[7] The dissociation of hydrogen into atoms. Part I. Experimental. [J].

Langmuir, I ;

Mackay, GMJ .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1914, 36 :1708-1722

[8] The thermal sensitivity and dielectric properties of SrTiO3-based ceramics [J].

Li, LT ;

Zhao, JC ;

Gui, ZL .

CERAMICS INTERNATIONAL, 2004, 30 (07) :1073-1078

[9] High temperature NTC BaTiO3-based ceramic resistors [J].

Luo, Y ;

Liu, XY .

MATERIALS LETTERS, 2005, 59 (29-30) :3881-3884

[10] An overview of micromachined platforms for thermal sensing and gas detection [J].

Manginell, RP ;

Smith, JH ;

Ricco, AJ .

SMART ELECTRONICS AND MEMS - SMART STRUCTURES AND MATERIALS 1997, 1997, 3046 :273-284

← 1 2 3 →