Survey of the present state of the art of piezoelectric linear motors

Piezoelectric ultrasonic motors have been investigated for several years and have already found their first practical applications. Their key feature is that they are able to produce a high thrust force related to their volume. Beside rotary drives like the travelling wave motor, linear drives have also been developed, but only a few are presently commercially available. In the present paper, we first describe the state of the art of linear piezoelectric motors. The motors are characterized with respect to their no-load velocity, maximum thrust force, efficiency and other technical properties. In the second part, we present a new motor, which is judged to be capable of surpassing the characteristics of other piezoelectric motors because of its unique design which allows the piezoelectric drive elements to be pre-stressed in the direction of their polarization. The piezoelectric elements convert energy using the longitudinal d(33) effect which allows an improved reliability, large vibration amplitudes and excellent piezoelectric coupling. Energy loss by vibration damping is minimized, and the efficiency can be improved significantly. Experimental results show that the motor characteristics can be optimized for a particular task by choosing the appropriate operating parameters such as exciting voltage, exciting frequency and normal force. (C) 2000 Elsevier Science B.V. All rights reserved.