Flexible ferroelectret field-effect transistor for large-area sensor skins and microphones

被引:170
作者
Graz, Ingrid
Kaltenbrunner, Martin
Keplinger, Christoph
Schwodiauer, Reinhard
Bauer, Siegfried
Lacour, Stephanie P.
Wagner, Sigurd
机构
[1] Johannes Kepler Univ, A-4040 Linz, Austria
[2] Princeton Univ, Dept Elect Engn, Princeton, NJ 08544 USA
[3] Princeton Univ, Princeton Inst Sci & Technol Mat, Princeton, NJ 08544 USA
基金
奥地利科学基金会;
关键词
D O I
10.1063/1.2335838
中图分类号
O59 [应用物理学];
学科分类号
摘要
Ferroelectrets generate an electric field large enough to modulate the conductance of the source-drain channel of a thin-film field-effect transistor. Integrating a ferroelectret with a thin-film transistor produces a ferroelectret field-effect transistor. The authors made such transistors by laminating cellular polypropylene films and amorphous silicon thin-film transistors on polyimide substrates. They show that these ferrroelectret field-effect transistors respond in a static capacitive or dynamic piezoelectric mode. A touch sensor, a pressure-activated switch, and a microphone are demonstrated. The structure can be scaled up to large-area flexible transducer arrays, such as roll-up steerable compliant sensor skin. (c) 2006 American Institute of Physics.
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页数:3
相关论文
共 18 条
[1]   A SIMPLE TECHNIQUE TO INTERFACE PYROELECTRIC MATERIALS WITH SILICON SUBSTRATES FOR INFRARED DETECTION [J].
BAUER, S ;
PLOSS, B .
FERROELECTRICS LETTERS SECTION, 1989, 9 (06) :155-160
[2]   Ferroelectrets: Soft electroactive foams for transducers [J].
Bauer, S ;
Gerhard-Multhaupt, R ;
Sessler, GM .
PHYSICS TODAY, 2004, 57 (02) :37-43
[3]  
CRAWFORD GP, 2005, WILEY SERIES DISPLAY, P528
[4]   Elastic and electromechanical properties of polypropylene foam ferroelectrets -: art. no. 031910 [J].
Dansachmüller, M ;
Schwödiauer, R ;
Bauer-Gogonea, S ;
Bauer, S ;
Paajanen, M ;
Raukola, J .
APPLIED PHYSICS LETTERS, 2005, 86 (03) :1-3
[5]   Amorphous silicon thin-film transistors on compliant polyimide foil substrates [J].
Gleskova, H ;
Wagner, S .
IEEE ELECTRON DEVICE LETTERS, 1999, 20 (09) :473-475
[6]   High-sensitivity piezoelectric microphones based on stacked cellular polymer films [J].
Hillenbrand, J ;
Sessler, GM .
JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 2004, 116 (06) :3267-3270
[7]   Electromechanical properties of an ultrathin layer of directionally aligned helical polypeptides [J].
Jaworek, T ;
Neher, D ;
Wegner, G ;
Wieringa, RH ;
Schouten, AJ .
SCIENCE, 1998, 279 (5347) :57-60
[8]   Charged cellular polymers with "ferroelectretic" behavior [J].
Lindner, M ;
Hoislbauer, H ;
Schwödiauer, R ;
Simona, BGD ;
Bauer, S .
IEEE TRANSACTIONS ON DIELECTRICS AND ELECTRICAL INSULATION, 2004, 11 (02) :255-263
[9]   FERROELECTRIC POLYMERS [J].
LOVINGER, AJ .
SCIENCE, 1983, 220 (4602) :1115-1121
[10]   High-performance solution-processed polymer ferroelectric field-effect transistors [J].
Naber, RCG ;
Tanase, C ;
Blom, PWM ;
Gelinck, GH ;
Marsman, AW ;
Touwslager, FJ ;
Setayesh, S ;
De Leeuw, DM .
NATURE MATERIALS, 2005, 4 (03) :243-248