Electrical properties of crystalline ITO films prepared at room temperature by pulsed laser deposition on plastic substrates

被引：50

作者：

Izumi, H ^{[1
]}

Ishihara, T ^{[1
]}

Yoshioka, H ^{[1
]}

Motoyama, M ^{[1
]}

机构：

[1] Hyogo Prefectural Inst Ind Res, Suma Ku, Kobe, Hyogo 6540037, Japan

来源：

THIN SOLID FILMS | 2002年 / 411卷 / 01期

关键词：

pulsed laser deposition; indium-tin-oxide (ITO); transparent conducting film; polycarbonate; in situ laser irradiation;

D O I：

10.1016/S0040-6090(02)00169-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Electrical properties of crystalline indium-tin-oxide (ITO) films, which were grown on polycarbonate (PC) substrates at room temperature by pulsed laser deposition (PLD) with in situ laser irradiation onto the substrates, were studied. The PC substrates were colored by in situ laser irradiation when the ITO films were prepared on the substrates directly, and the resistivity of the ITO films was extremely high. While the PC substrates were prevented from coloring by pre-deposition of CeO2 film, the resistivity was still high. The introduction of a thin Al2O3 layer between the PC substrate and CeO2 film resulted in marked decreasing of the resistivity of the ITO film. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：32 / 35

页数：4

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