Slow electrons impinging on dielectric solids .1. Basic aspects

被引：15

作者：

Dapor, M

Miotello, A

机构：

[1] IST TRENTINO CULTURA,CTR MAT & BIOFIS MED,I-38050 POVO,TRENTO,ITALY

[2] UNIV TRENT,DIPARTIMENTO FIS,I-38050 POVO,TRENTO,ITALY

来源：

PHYSICAL REVIEW B | 1997年 / 56卷 / 04期

关键词：

D O I：

10.1103/PhysRevB.56.2234

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The basic aspects related to the scattering processes, useful for both the analytical and Monte Carlo calculation of backscattering and the depth distribution of low-energy (E-0 less than or equal to 10 keV) electrons impinging on solid targets, are described. After a careful analysis of the scattering mechanisms, selected new results regarding elastic and inelastic scattering of low-energy electrons impinging on SiO2 are reported. Comparison with experimental data and earlier theoretical results show a general good agreement.

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页码：2234 / 2240

页数：7

相关论文

共 75 条

[1] Inelastic electron interactions in the energy range 50 eV to 10 keV in insulators: Alkali halides and metal oxides [J].

Akkerman, A ;

Boutboul, T ;

Breskin, A ;

Chechik, R ;

Gibrekhterman, A ;

Lifshitz, Y .

PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 1996, 198 (02) :769-784

[2]

[Anonymous], 1984, 37 ICRU

[3] ELECTRON INELASTIC MEAN FREE PATHS AND ENERGY-LOSSES IN SOLIDS .1. ALUMINUM METAL [J].

ASHLEY, JC ;

TUNG, CJ ;

RITCHIE, RH .

SURFACE SCIENCE, 1979, 81 (02) :409-426

[4] CALCULATIONS OF MEAN FREE PATHS AND STOPPING POWERS OF LOW-ENERGY ELECTRONS (LESS-THAN-OR-EQUAL-TO 10 KEV) IN SOLIDS USING A STATISTICAL-MODEL [J].

ASHLEY, JC ;

TUNG, CJ ;

RITCHIE, RH ;

ANDERSON, VE .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1976, 23 (06) :1833-1837

[5] ENERGY-LOSS RATE AND INELASTIC MEAN FREE-PATH OF LOW-ENERGY ELECTRONS AND POSITRONS IN CONDENSED MATTER [J].

ASHLEY, JC .

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1990, 50 (04) :323-334

[6] INTERACTION OF LOW-ENERGY ELECTRONS WITH CONDENSED MATTER - STOPPING POWERS AND INELASTIC MEAN FREE PATHS FROM OPTICAL-DATA [J].

ASHLEY, JC .

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1988, 46 (03) :199-214

[7] ENERGY-LOSSES AND MEAN FREE PATHS OF ELECTRONS IN SILICON DIOXIDE [J].

ASHLEY, JC ;

ANDERSON, VE .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1981, 28 (06) :4132-4136

[8] PENELOPE - AN ALGORITHM FOR MONTE-CARLO SIMULATION OF THE PENETRATION AND ENERGY-LOSS OF ELECTRONS AND POSITRONS IN MATTER [J].

BARO, J ;

SEMPAU, J ;

FERNANDEZVAREA, JM ;

SALVAT, F .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 100 (01) :31-46

[9]

BERGER MJ, 1964, NATL ACAD SCI NATL R, V1133, P205

[10]

Bethe H, 1930, ANN PHYS-BERLIN, V5, P325

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