Length adjustment of carbon nanotube probe by electron bombardment

被引:31
作者
Akita, S [1 ]
Nakayama, Y [1 ]
机构
[1] Univ Osaka Prefecture, Dept Phys & Elect, Sakai, Osaka 5998531, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2002年 / 41卷 / 7B期
关键词
carbon nanotube; field emission; field evaporation; nanoprocessing; nanomanipulation; scanning probe microscopy;
D O I
10.1143/JJAP.41.4887
中图分类号
O59 [应用物理学];
学科分类号
摘要
A method for the processing of an individual nanotube, which is based on the thermally assisted field evaporation process, has been performed using a nanomanipulator installed in a scanning electron microscope. One nanotube is placed opposite another at a distance of about one micrometer and voltage is applied between them. As the voltage is increased, one of the nanotubes is locally heated by electron bombardment at the tip and is shortened by thermally assisted field evaporation, where another nanotube is used as an electron emission source. A nanotube for an atomic force microscope probe has successfully been processed on a scale of similar to 100 nm using the proposed method.
引用
收藏
页码:4887 / 4889
页数:3
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