ZnO growth by chemical vapour transport

被引:88
作者
Ntep, JM [1 ]
Hassani, SS [1 ]
Lusson, A [1 ]
Tromson-Carli, A [1 ]
Ballutaud, D [1 ]
Didier, G [1 ]
Triboulet, R [1 ]
机构
[1] CNRS, Lab Phys Solides Bellevue, F-92195 Meudon, France
关键词
ZnO; chemically assisted sublimation;
D O I
10.1016/S0022-0248(99)00363-2
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
With the intention of achieving growth at moderate temperature, chemical vapour transport using chlorine and carbon as transporting agents is studied for the growth of ZnO crystals. A chemical vapour transport process in which carbon is the essential transport agent is suggested. Crystals of size 1 cm(3) are obtained after 40 days of using a source temperature of 1000 degrees C and a source temperature-growth temperature difference Delta T of similar to 30 degrees C. Rocking-curve FWHM in the 30 arcsec range are measured and well-resolved pseudo Kikuchi lines observed on (0 0 0 1) planes by electron scanning microscopy. The residual concentration of chlorine atoms in the crystals is estimated from XPS measurements to be about 0.05%. The electron concentration of the crystals at room temperature reaches values as high as 3 x 10(19) cm(-3). The ionisation energy of the residual donor (chlorine?) in ZnO is found close to 23 meV. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:30 / 34
页数:5
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