Pressure-driven water flows in trapezoidal silicon microchannels

被引：331

作者：

Qu, WL ^{[1
]}

Mala, GM ^{[1
]}

Li, DQ ^{[1
]}

机构：

[1] Univ Alberta, Dept Mech Engn, Edmonton, AB T6G 2G8, Canada

来源：

INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER | 2000年 / 43卷 / 03期

基金：

加拿大自然科学与工程研究理事会;

关键词：

Flow measurement - Flow of water - Friction - Laminar flow - Mathematical models - Microelectromechanical devices - Pressure drop - Pressure measurement - Silicon;

D O I：

10.1016/S0017-9310(99)00148-9

中图分类号：

O414.1 [热力学];

学科分类号：

摘要：

Experiments were conducted to investigate flow characteristics of water through trapezoidal silicon microchannels with a hydraulic diameter ranging from 51 to 169 mu m. In the experiments, the flow rate and pressure drop across the microchannels were measured at steady states. The experimental results were compared with the predictions from the conventional laminar flow theory. A significant difference between the experimental data and the theoretical predictions was found. Experimental results indicate that pressure gradient and flow friction in microchannels are higher than those given by the conventional laminar flow theory. The measured higher pressure gradient and flow friction maybe be due to the effect of surface roughness of the microchannels. A roughness-viscosity model is proposed to interpret the experimental data. (C) 1999 Elsevier Science Ltd. All rights reserved.

引用

页码：353 / 364

页数：12

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