Thin transparent pin-photodiodes for length measurements

被引：18

作者：

Bunte, E ^{[1
]}

Mandryka, V

Jun, KH

Büchner, HJ

Jäger, G

Stiebig, H

机构：

[1] Res Ctr, Inst Photovolta, D-52425 Julich, Germany

[2] Tech Univ Ilmenau, Inst Measurement & Sensor Technol, D-98684 Ilmenau, Germany

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2004年 / 113卷 / 03期

关键词：

amorphous silicon; transparent photodetector; standing wave; interferometer;

D O I：

10.1016/j.sna.2004.03.067

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present new interferometers for length measurements based on sampling an optical standing wave. The interference of two laser beams propagating in opposite direction results in a sinusoidal light intensity profile. Thin transparent pin-photodiodes based on amorphous silicon and deposited on a glass substrate enable the detection of this intensity profile. Introducing the detectors into the standing wave, photocurrents according to the intensity profile at the spatial position of the absorber layer can be measured. Two individual detectors positioned on the optical axis with a defined phase allow bi-directional fringe counting. Additionally, the two pin-photodiodes were integrated in one detector system. The measurement of Lissajous figures demonstrate the potential of the concepts for length measurements. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：334 / 337

页数：4

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