A novel actuation mechanism on the basis of ferromagnetic SMA thin films

被引：114

作者：

Kohl, M

Brugger, D

Ohtsuka, M

Takagi, T

机构：

[1] Forschungszentrum Karlsruhe, IMT, D-76021 Karlsruhe, Germany

[2] Tohoku Univ, Aoba Ku, Sendai, Miyagi 9808577, Japan

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2004年 / 114卷 / 2-3期

关键词：

sputter deposition; smart materials; Ni2MnGa thin films; shape memory actuator; microscanner;

D O I：

10.1016/j.sna.2003.11.006

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 [电气工程]; 0809 [电子科学与技术];

摘要：

A novel actuation mechanism is presented, which makes use of the antagonism of intrinsic magnetic and shape recovery forces acting on a ferromagnetic shape memory alloy (SMA) microactuator in a magnetic field. This mechanism is associated with large actuation and small biasing forces in each actuation direction resulting in a large stroke. Since no additional biasing elements are required, extremely compact designs are possible. As a demonstrator, an optical microscanner of 7 mm x 3 mm x 5 mm size is presented showing large scanning angles up to 120degrees in off-resonance mode. The scanning performance keeps frequency independent below a critical frequency, which is determined by heat transfer times. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：445 / 450

页数：6

共 12 条

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Magnetostriction of martensite [J].