Genetic algorithm for ellipsometric data inversion of absorbing layers

被引：20

作者：

Cormier, G ^{[1
]}

Boudreau, R ^{[1
]}

机构：

[1] Univ Moncton, Ecole Genie, Moncton, NB E1A 3E9, Canada

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 2000年 / 17卷 / 01期

关键词：

D O I：

10.1364/JOSAA.17.000129

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A new data reduction method is presented for single-wavelength ellipsometry. A genetic algorithm is applied to ellipsometric data to find the best fit. The sample consists of a single absorbing layer on a semi-infinite substrate. The genetic algorithm has good convergence and is applicable to many different problems, including those with different independent measurements and situations with more than two angles of incidence. Results are similar to those obtained by other inversion techniques. (C) 2000 Optical Society of America [S0740-3232(00)02201-8].

引用

页码：129 / 134

页数：6

共 15 条

[1]

[Anonymous], 1989, GENETIC ALGORITHM SE

[2]

[Anonymous], 1991, Handbook of genetic algorithms

[3]

Azzam R.M. A., 1996, Ellipsometry and polarized light

[4] Ellipsometric methods for absorbing layers: A modified downhill simplex algorithm [J].

Bosch, S ;

Monzonis, F ;

Masetti, E .

THIN SOLID FILMS, 1996, 289 (1-2) :54-58

[5] Numerical algorithm for spectroscopic ellipsometry of thick transparent films [J].

Bosch, S ;

Perez, J ;

Canillas, A .

APPLIED OPTICS, 1998, 37 (07) :1177-1179

[6] POLYNOMIAL INVERSION OF THE SINGLE TRANSPARENT LAYER PROBLEM IN ELLIPSOMETRY [J].

DROLET, JP ;

RUSSEV, SC ;

BOYANOV, MI ;

LEBLANC, RM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1994, 11 (12) :3284-3291

[7] NUMERICAL-METHOD FOR THE ELLIPSOMETRIC DETERMINATION OF OPTICAL-CONSTANTS AND THICKNESS OF THIN-FILMS WITH MICROCOMPUTERS [J].

EASWARAKHANTHAN, T ;

MICHEL, C ;

RAVELET, S .

SURFACE SCIENCE, 1988, 197 (1-2) :339-345

[8] OPTIMIZATION OF INTERFERENCE FILTERS WITH GENETIC ALGORITHMS APPLIED TO SILVER-BASED HEAT MIRRORS [J].

EISENHAMMER, T ;

LAZAROV, M ;

LEUTBECHER, M ;

SCHOFFEL, U ;

SIZMANN, R .

APPLIED OPTICS, 1993, 32 (31) :6310-6315

[9]

HOLLAND JH, 1975, ADAPTATION NATURAL A

[10] USE OF THE BIASED ESTIMATOR IN THE INTERPRETATION OF SPECTROSCOPIC ELLIPSOMETRY DATA [J].

JELLISON, GE .

APPLIED OPTICS, 1991, 30 (23) :3354-3360

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